Oleds for micro transfer printing

ABSTRACT

An organic light-emitting diode (OLED) structure includes an organic light-emitting diode having a first electrode, one or more layers of organic material disposed on at least a portion of the first electrode, and a second electrode disposed on at least a portion of the one or more layers of organic material. At least a portion of a tether extending from a periphery of the organic light-emitting diode. The organic light-emitting diodes can be printable organic light-emitting diode structures that are micro transfer printed over a display substrate to form a display.

FIELD OF THE INVENTION

The present invention relates to organic light-emitting diode (OLED)displays and to micro transfer printing.

BACKGROUND OF THE INVENTION

Flat-panel displays are widely used in conjunction with computingdevices, in portable devices, and for entertainment devices such astelevisions. Such displays typically employ a plurality of pixelsdistributed over a display substrate to display images, graphics, ortext. In a color display, each pixel includes light emitters that emitlight of different colors, such as red, green, and blue. For example,liquid crystal displays (LCDs) employ liquid crystals to block ortransmit light from a backlight behind the liquid crystals and organiclight-emitting diode (OLED) displays rely on passing current through alayer of organic material that glows in response to the current.Displays using inorganic light emitting diodes (LEDs) are also inwidespread use for outdoor signage and have been demonstrated in a55-inch television.

The various light-emitting technologies have different characteristics,advantages, and disadvantages. For example, liquid crystals are simpleto control and have a highly developed and sophisticated technologicalinfrastructure. Organic LEDs are area emitters, can be more efficientand flexible, and are demonstrated in a very thin form factor. Inorganiclight-emitting diodes are very efficient and provide relativelysaturated light in an environmentally robust structure. Lasers are alsoefficient, provide a virtually monochromatic light, but have a limitedviewing angle. None of these technologies, however, meet all of adisplay viewer's needs under all circumstances.

Organic light-emitting diodes are widely used in portable electronicdevices with displays and in some televisions. Organic LEDs are areaemitters, can be efficient and flexible, can have a very thin formfactor, and have an excellent viewing angle. However, the process usedto manufacture OLED displays has some challenging steps. An OLED emittertypically includes several layers, for example a hole-injection layer, alight-emitting layer, and an electron-injection layer. Thehole-injection layer is coated on a first electrode such as an anode anda second electrode such as a cathode is formed on an electron-injectionlayer. Alternatively, an electron-injection layer is formed on a cathodeand the anode is formed on a hole-injection layer.

One type of OLED display is made with a common unpatterned light emitterfor all pixels and patterned color filters that filter the light fromeach light-emitter in the display. Different color filters producedifferent colors and the common light emitter emits white light, forexample a combination of blue and yellow light. This display type issimilar to the color-filter approach found in LCDs and suffers from theloss of approximately two thirds of the emitted light in the colorfilters.

Another type of OLED display uses different organic material patternedover a display substrate. The different OLED materials are chosen toemit different colors of light and are patterned to form pixels,typically arranged in stripes. The strip pattern is formed by depositingorganic material through a fine metal shadow mask. A different mask isused for each different set of materials, or at least for the differentlight-emitting layers. The alignment of the masks before deposition isdifficult, and the repeated use of the masks can damage depositedmaterials. Moreover, the masks must be periodically cleaned, are easilydamaged, difficult to make, and expensive.

There is a need, therefore, for devices, systems and methods forproviding OLED light emitters that have improved efficiency, reducedcosts, and fewer mechanical process steps.

SUMMARY OF THE INVENTION

The present invention provides structures, devices and methods fororganic light-emitting diodes and color displays that require fewer orno shadow masks for evaporative deposition of organic materials. Theorganic light-emitting diode structures can be micro transfer printedand organic light-emitting diode structures that each emit differentcolors of light can be separately constructed on separate sourcesubstrates, released from the source substrate, and micro transferprinted to a destination display substrate. The organic light-emittingdiode structures and methods mitigate the problems encountered withrepeated use of fine metal shadow masks, such as alignment to a commondisplay substrate and damage to organic materials deposited on thedisplay substrate.

Moreover, in an embodiment, the use of fine metal shadow masks isunnecessary for patterning evaporated organic materials. Higherresolution OLED displays are thereby enabled.

In one aspect, the disclosed technology includes a structure includingan organic light-emitting diode (OLED) having a first electrode, one ormore layers of organic material disposed on at least a portion of thefirst electrode, and a second electrode disposed on at least a portionof the one or more layers of organic material; and at least a portion ofa tether extending from a periphery of the organic light-emitting diode.

In certain embodiments, at least a portion of the first electrode istransparent.

In certain embodiments, at least a portion of the second electrode istransparent.

In certain embodiments, the layers of organic material comprise one ormore of a hole-injection layer, a light-emitting layer, and anelectron-injection layer.

In certain embodiments, the OLED has a light-emitting area that has adimension parallel to the first electrode that is less than or equal to40 microns, less than or equal to 20 microns, less than or equal to 10microns, or less than or equal to 5 microns.

In certain embodiments, the OLED has a light-emitting area that is lessthan or equal to 1600 square microns, less than or equal to 800 squaremicrons, less than or equal to 400 square microns, less than or equal to200 square microns, less than or equal to 100 square microns, or lessthan or equal to 50 square microns.

In certain embodiments, the first electrode comprises a transparentelectrode in electrical contact with an opaque first electrode portion,and a transparent insulator, wherein the transparent insulator is atleast partly in a common layer with the opaque first electrode portion.

In certain embodiments, the transparent electrode is disposed on atransparent insulator.

In certain embodiments, the first electrode comprises a first protrusionand the second electrode comprises a second protrusion separate from thefirst protrusion, the first and second protrusions extending in adirection from the second electrode to the first electrode.

In certain embodiments, the first electrode is a unitary electricalconductor.

In certain embodiments, the organic light-emitting diode is a topemitter.

In certain embodiments, the organic light-emitting diode is a bottomemitter.

In certain embodiments, the organic-light emitting diode alight-emissive area of less than 1600 square microns, less than or equalto 800 square microns, less than or equal to 400 square microns, lessthan or equal to 200 square microns, less than or equal to 100 squaremicrons, or less than or equal to 50 square microns.

In certain embodiments, the organic-light emitting diode has at leastone of a width from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, a lengthfrom 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, and a height from 2 to 5μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm.

In certain embodiments, the structure includes a source substrate havinga portion defining an anchor; and a sacrificial layer formed on thesource substrate and adjacent to the anchor, wherein the OLED isdisposed on the sacrificial layer and the tether is connected to theanchor.

In certain embodiments, an oxide layer or a pre-determined designatedportion of the source substrate.

In certain embodiments, the sacrificial layer comprises a cavity betweenthe organic light-emitting diode and the source substrate.

In certain embodiments, the structure includes a plurality of OLEDstructures formed on the source substrate, wherein the one or morelayers of organic material in each of the OLED structures is the same.

In certain embodiments, at least one of the one or more layers oforganic material emits red light, green light, or blue light.

In certain embodiments, the structure includes first and second OLEDstructures formed on the source substrate and wherein the first OLEDstructure comprises at least one layer of organic material that emits afirst color of light and the second OLED structure comprises at leastone layer of organic material that emits a second color of lightdifferent from the first color of light.

In certain embodiments, the structure includes a third OLED structureformed on the source substrate, wherein the third OLED structurecomprises at least one layer of organic material that emits a thirdcolor of light different from the first color of light and differentfrom the second color of light.

In certain embodiments, the first color of light is red, the secondcolor of light is green, and the third color of light is blue.

In certain embodiments, the portion of a tether extending from theperiphery of the organic light-emitting diode is a portion of a brokentether.

In certain embodiments, the structure includes a first conductiveprotrusion extending from the structure and electrically connected tothe first electrode; and a second conductive protrusion extending fromthe structure and electrically connected to the second electrode.

In another aspect, the disclosed technology includes a display havingprintable organic light-emitting diode structures, including: a displaysubstrate; one or more organic light-emitting diode structures describedabove and herein disposed on the display substrate; a first electricalconductor electrically connected to the first electrode; and a secondelectrical conductor electrically connected to the second electrode.

In certain embodiments, at least one of the first electrical conductorand the second electrical conductor is located on the display substrate.

In certain embodiments, one or more of the OLED structures are groupedinto pixels and the display comprises a pixel controller located on thedisplay substrate electrically connected to the first and secondelectrodes of the pixels in the group to control the light output fromthe OLED structures.

In certain embodiments, the display includes one or more inorganiclight-emitting diodes, wherein the one or more OLED structures comprisesa first OLED structure that emits light of a first color and a secondinorganic light-emitting diode that emits light of a second colordifferent from the first color.

In certain embodiments, the one or more OLED structures comprises atleast a first OLED structure that emits light of a first color and asecond OLED structure that emits light of a second color different fromthe first color.

In certain embodiments, two or more of the OLED structures are groupedinto pixels, each pixel including: a first OLED structure that emitslight of the first color; a second OLED structure that emits light ofthe second color; and a pixel substrate, separate and distinct from thedisplay substrate and the source substrate, on which the first andsecond OLED structures are disposed, wherein the pixel substrate isdisposed on the display substrate.

In certain embodiments, the display includes a pixel controller locatedon the pixel substrate electrically connected to the first and secondelectrodes of each of the first and second OLED structures in the pixelto control the light output from the first and second OLED structures.

In certain embodiments, the organic light-emitting diode is a topemitter.

In certain embodiments, the organic light-emitting diode is a bottomemitter.

In certain embodiments, the organic-light emitting diode alight-emissive area of less than 1600 square microns, less than or equalto 800 square microns, less than or equal to 400 square microns, lessthan or equal to 200 square microns, less than or equal to 100 squaremicrons, or less than or equal to 50 square microns.

In certain embodiments, the organic-light emitting diode has at leastone of a width from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, a lengthfrom 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, and a height from 2 to 5μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm.

In certain embodiments, the display substrate has a thickness from 5 to10 microns, 10 to 50 microns, 50 to 100 microns, 100 to 200 microns, 200to 500 microns, 500 microns to 0.5 mm, 0.5 to 1 mm, 1 mm to 5 mm, 5 mmto 10 mm, or 10 mm to 20 mm.

In certain embodiments, the display substrate comprises a polymer,plastic, resin, polyimide, PEN, PET, metal, metal foil, glass, asemiconductor, or sapphire.

In certain embodiments, the display substrate has a transparency greaterthan or equal to 50%, 80%, 90%, or 95% for visible light.

In certain embodiments, the organic light-emitting diode, whenenergized, emits light in a direction opposite the display substrate.

In certain embodiments, the organic light-emitting diode, whenenergized, emits light through the display substrate.

In another aspect, the disclosed technology includes a method of makingan OLED structure, including: providing a source substrate; patterning asacrificial layer on the source substrate; patterning a first electrodeon the sacrificial layer; patterning one or more layers of organicmaterial on at least a portion of the patterned first electrode; andpatterning a second electrode on at least a portion of the one or morelayers of organic material to form an OLED structure.

In certain embodiments, the method includes removing at least a portionof the sacrificial layer, thereby partially releasing the OLED structurefrom the source substrate.

In certain embodiments, the method includes micro transfer printing theOLED structure from the source substrate to a display substrate.

In certain embodiments, the one or more layers of organic material areone or more layers of organic material that emit blue light and the OLEDstructure is a blue OLED structure that emits blue light when a currentis applied thereto.

In certain embodiments, the method includes forming a red OLED structurethat emits red light when a current is applied thereto, including:providing a second source substrate; patterning a second sacrificiallayer on or in the second source substrate; patterning a first electrodeon the second sacrificial layer; patterning one or more layers oforganic material that emit red light on at least a portion of thepatterned first electrode on the second sacrificial layer; andpatterning a second electrode on at least a portion of the one or morelayers of organic material that emit red light; and forming a green OLEDstructure that emits green light when a current is applied thereto,including: providing a third source substrate; patterning a thirdsacrificial layer on or in the third source substrate; patterning afirst electrode on the third sacrificial layer; patterning one or morelayers of organic material that emit green light on at least a portionof the patterned first electrode on the third sacrificial layer; andpatterning a second electrode on at least a portion of the one or morelayers of organic material that emit green light.

In certain embodiments, the method includes micro transfer printing thered OLED structure from the red source substrate to a display substrate;micro transfer printing the green OLED structure from the green sourcesubstrate to the display substrate; and micro transfer printing the blueOLED structure from the blue source substrate to the display substrate.

In certain embodiments, the at least ten thousand, one-hundred thousand,one million, or ten million OLEDs are on each source substrate.

In certain embodiments, patterning the one or more layers of organicmaterial on the patterned first electrode comprises depositing thelayers of organic material through a fine metal shadow mask.

In certain embodiments, patterning the one or more layers of organicmaterial on the patterned first electrode and patterning the secondelectrode on the one or more layers of organic material includes:blanket depositing the layers of organic material over an area of thesource substrate; blanket depositing the second electrode over thelayers of organic material; forming a patterned protective layer overthe second electrode, the patterned protective layer defining thepattern of the one or more layers of organic material; patterning thesecond electrode by exposing the second electrode to an active materialthat removes second electrode material exposed to the line-of-flight ofthe active material; and patterning the one or more layers of organicmaterial by exposing the one or more layers of organic material to anactive material that removes the one or more layers of organic materialexposed to the line-of-flight of the active material.

In certain embodiments, patterning the one or more layers of organicmaterial on the patterned first electrode and patterning the secondelectrode on the one or more layers of organic material includes:removing the patterned protective layer.

In certain embodiments, patterning the one or more layers of organicmaterial on the patterned first electrode and patterning the secondelectrode on the one or more layers of organic material includes:providing additional patterned second electrode material to form thepatterned second electrode and protect the one or more layers of organicmaterial.

In certain embodiments, the organic light-emitting diode is a topemitter.

In certain embodiments, the organic light-emitting diode is a bottomemitter.

In certain embodiments, the organic-light emitting diode alight-emissive area of less than 1600 square microns, less than or equalto 800 square microns, less than or equal to 400 square microns, lessthan or equal to 200 square microns, less than or equal to 100 squaremicrons, or less than or equal to 50 square microns.

In certain embodiments, the organic-light emitting diode has at leastone of a width from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, a lengthfrom 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, and a height from 2 to 5μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm.

In another aspect, the disclosed technology includes a wafer ofprintable organic light-emitting diodes, including: a source substrate;a plurality of organic light-emitting diodes formed on the substrate,each organic light-emitting diode having a first electrode, one or morelayers of organic material disposed on at least a portion of the firstelectrode, and a second electrode disposed on at least a portion of theone or more layers of organic material; one or more anchors on thesource substrate; and a plurality of tethers, each organiclight-emitting diode releasably secured to the source substrate by atleast one anchor and at least one tether.

In certain embodiments, the wafer includes a sacrificial layer at leastpartially between the organic light-emitting diodes and the sourcesubstrate, wherein the plurality of organic light-emitting diodes aredisposed on the sacrificial layer.

In certain embodiments, an oxide layer or a pre-determined designatedportion of the source substrate.

In certain embodiments, the sacrificial layer comprises a cavity betweenthe organic light-emitting diode and the source substrate.

In certain embodiments, there is an air gap between the organiclight-emitting diodes and the source substrate.

In certain embodiments, the one or more layers of organic material ineach of the organic light-emitting diodes is the same.

In certain embodiments, at least one of the one or more layers oforganic material emits red light, green light, or blue light when acurrent is applied thereto.

In certain embodiments, at least ten thousand, one-hundred thousand, onemillion, or ten million OLEDs are on the source substrate.

In certain embodiments, the organic light-emitting diodes are topemitter.

In certain embodiments, the organic light-emitting diodes are bottomemitters.

In certain embodiments, the organic-light emitting diodes have alight-emissive area of less than 1600 square microns, less than or equalto 800 square microns, less than or equal to 400 square microns, lessthan or equal to 200 square microns, less than or equal to 100 squaremicrons, or less than or equal to 50 square microns.

In certain embodiments, the organic-light emitting diodes have at leastone of a width from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, a lengthfrom 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, and a height from 2 to 5μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm.

Organic light emitters have better power conversion efficiencies at lowcurrent density than some inorganic light emitters. It is an object ofthe present invention to provide organic emitters that supplement theemitter population of displays made from assemblies of micro scaleinorganic LEDs. It is also an object of the present invention to providephotoluminescent down-converters for blue or violet micro-assembledinorganic LEDs.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, aspects, features, and advantages ofthe present disclosure will become more apparent and better understoodby referring to the following description taken in conjunction with theaccompanying drawings, in which:

FIG. 1 is a cross section of an embodiment of the present invention;

FIGS. 2A-2I are cross sections of successive structures useful in makingthe structure of FIG. 1 in an embodiment of the present invention;

FIG. 3 is a cross section of an alternative embodiment of the presentinvention;

FIGS. 4A and 4B are top views and bottom views respectively of thestructure in FIG. 3 in an embodiment of the present invention;

FIGS. 5A-5J are cross sections of successive structures useful in makingthe structure of FIG. 3 in an embodiment of the present invention;

FIG. 6 is a cross section of an alternative top-emitter orbottom-emitter embodiment of the present invention; and

FIGS. 7A-7O are cross sections of successive structures useful in makingthe structures of FIGS. 1, 3, and 5 in an alternative embodiment of thepresent invention that does not require shadow masks;

FIG. 8 is a perspective of a display in an embodiment of the presentinvention;

FIG. 9 is a perspective of a pixel having a separate substrate accordingto an embodiment of the present invention;

FIG. 10 is a perspective of a display in an embodiment of the presentinvention using the pixels of FIG. 9; and

FIGS. 11 and 12 are flow diagrams illustrating methods in variousembodiments of the present invention.

The features and advantages of the present disclosure will become moreapparent from the detailed description set forth below when taken inconjunction with the drawings, in which like reference charactersidentify corresponding elements throughout. In the drawings, likereference numbers generally indicate identical, functionally similar,and/or structurally similar elements. The figures are not drawn to scalesince the variation in size of various elements in the Figures is toogreat to permit depiction to scale.

DETAILED DESCRIPTION OF THE INVENTION

Referring to the cross section of FIG. 1, in an embodiment of thepresent invention an organic light-emitting diode (OLED) structure 10includes an organic light-emitting diode 65 having a first electrode 55,one or more layers of organic material 60 disposed on at least a portionof the first electrode 55, and a second electrode 52 disposed on atleast a portion of the one or more layers of organic material 60. TheOLED structure 10 includes at least a portion of a tether 12 extendingfrom a periphery of the organic light-emitting diode 65. In anembodiment, the OLED structure 10 is a micro transfer printable OLED 65.

In the embodiment of FIG. 1, the first electrode 55 includes a firstelectrode portion 50 and a transparent electrode 40 that is inelectrical contact with the first electrode portion 50. The firstelectrode portion 50 can be opaque, for example made of an electricallyconductive metal such as aluminum, silver, gold, tungsten, or titanium.The transparent electrode 40 can be any transparent conductor such as atransparent conductive metal oxide such as indium tin oxide or aluminumzinc oxide. The second electrode 52 can be a metal layer made of aconductive metal such as aluminum, silver, gold, tungsten, or titaniumand can be made of the same material as the first electrode portion 50,or a different material.

The OLED 65 can be constructed on a transparent insulator 30 and aninsulator 32. The insulator 32 can be transparent and comprise the samematerial as the transparent insulator 30 or the insulator 32 can be adifferent, opaque material. The transparent insulator 30 or insulator 32can be, for example, silicon dioxide or silicon nitride. The transparentelectrode 40 is formed at least partly on the transparent insulator 30and the transparent insulator 30 is at least partly in a common layerwith the opaque first electrode portion 50. The transparent insulator 30transmits light emitted from the one or more layers of organic material60. The insulator 32 electrically insulates the first electrode portion50 from the second electrode 52 so that a voltage difference can beestablished between the first and second electrodes 55, 52 causingcurrent to flow between the first and second electrodes 55, 52 throughthe one or more layers of organic material 60, causing at least one ofthe one or more layers of organic material 60 to emit light.

The insulator 32 prevents electrical shorts between the first electrodeportion 50 and the second electrode 52 and allows the first electrode 55to extend beyond the second electrode 52 enabling an external electricalconnection to the first electrode 55, for example an external electricalconnection on a display substrate (not shown in FIG. 1).

The one or more layers of organic material 60 can be evaporativelydeposited on the transparent electrode 40 and can include ahole-injection layer, a light-emitting layer, and an electron-injectionlayer. Bank insulators 34 formed on the edges or corners of thetransparent electrode 40 prevents electrical shorts between thetransparent electrode 40 and the second electrode 52 at the edges orcorners of the transparent electrode 40.

The OLED structure 10 includes a tether 12 physically connecting theOLED 65 extending from a periphery of the organic light-emitting diode65. In the embodiment of FIG. 1, the tether 12 is an extension of thetransparent insulator 30 beyond the OLED 65 and is attached to a portionof a source substrate 20 forming an anchor 14. A sacrificial layer 18 isformed beneath the OLED structure 10 so that the OLED structure 10 isonly connected to the source substrate 20 by the tether 12 to the anchor14. Thus, the OLED structure 10 can be released from the sourcesubstrate 20 by contacting the OLED 65 with a stamp, pressing the stampagainst the OLED 65 to fracture the tether 12. The OLED 65 can then bemicro transfer printed to a destination substrate such as a displaysubstrate (not shown in FIG. 1).

The sacrificial layer 18 can be a cavity that is etched out from underthe OLED 65 to form the tether 12 and OLED structure 10. Alternatively,according to embodiments of the present invention, the sacrificial layer18 is a physical layer, such as an oxide layer on the source substrate20 on which the OLED 65 is constructed. In another embodiment, thesource substrate 20 is a semiconductor substrate, such as silicon (1 00) or silicon (1 1 1), and the sacrificial layer 18 is a pre-determineddesignated portion of the source substrate 20.

The cross sections of FIGS. 2A-2I and the flow diagram of FIG. 11illustrate successive steps in making an embodiment of the presentinvention. As shown in FIG. 2A, a source substrate 20 is provided instep 100. The source substrate 20 can be any substrate on which thesubsequent structures can be formed and can include a glass, plastic, orsemiconductor substrate having opposing substantially planar surfaces onwhich lithographic processes can be performed. The embodiment describeduses a semiconductor substrate, for example silicon (1 0 0) or silicon(1 1 1).

For clarity and brevity of exposition, in the following steps and alsowith respect to FIGS. 5A-5J, repeated references are made to forming apatterned layer or structure. Patterned layers are typically made in thephotolithographic arts by first depositing a blanket layer of a desiredmaterial, for example by evaporation or sputtering. A blanket layer isunpatterned and covers the exposed area of a substrate. A photoresistlayer, either positive or negative and for example SUB, is thendeposited in a blanket layer over the desired material and exposed to apattern of electromagnetic radiation such as ultra-violet radiation topattern-wise cure the photoresist. The uncured photoresist is thenremoved to expose a pattern of the desired material. The exposed desiredmaterial is then etched, for example with a wet etchant, a dry etch, aplasma, reactive ions, or other active materials to remove the exposeddesired material. Optionally, the cured photoresist is then removed, forexample using an etchant specific to the cured photoresist, leaving apattern of the desired material.

Referring to FIG. 2B, a first electrode portion 50 is deposited andpatterned on or in the source substrate 20 in step 110. For example, thefirst electrode portion 50 can be a metal such as aluminum, titanium,tungsten, gold, silver, or other electrically conductive materialsincluding conductive inks, semiconductors, or doped semiconductors.

A layer of transparent insulator 30 is patterned over the firstelectrode portion 50 in step 120, leaving an exposed gap in thetransparent insulator 30, as shown in FIG. 2C. A suitable transparentinsulator 30 is silicon nitride or silicon dioxide. The transparentinsulator 30 can be partially transparent, for example 50%, 70%, 80%,90%, or 95% transparent to visible light. Two portions of transparentinsulator 30 (a left and a right portion) are shown in FIG. 2C. Theright portion can be opaque and does not need to be transparent. Asshown in FIG. 1, the right portion of the insulating layer is labeled as32, an insulator and can be formed and patterned separately from thetransparent insulator 30 and can be a different material than thetransparent insulator 30. In an embodiment, however, both thetransparent insulator 30 and insulator 32 of FIG. 1 are transparent andare made in a common process with common materials so that the insulator32 is also a transparent insulator 30.

Referring next to FIG. 2D, in step 130 a transparent electrode 40 ispatterned over the transparent insulator 30 and in electrical contactwith the first electrode portion 50. The transparent electrode 40 istherefore in electrical contact with the first electrode portion 50 andthe first electrode 55 includes both the first electrode portion 50 andthe transparent electrode 40. As shown in FIG. 2E, bank insulators 34are formed and patterned in step 140 on the edges of the transparentelectrode 40. The bank insulators 34 can be made of the same materialsas the transparent insulator 30 or insulator 32, or a differentinsulating material. The bank insulators 34 can, but need not, betransparent.

As shown in FIG. 2F, one or more layers of organic material 60 arepatterned over the transparent electrode 40 in step 150. The one or morelayers of organic material 60 can extend, but need not extend, over thebank insulators 34 and transparent insulators 30 (and insulator 32 asshown in FIG. 1). In an embodiment, the one or more layers of organicmaterial 60 are deposited by evaporation and patterned with a fine metalmask placed over the transparent conductor 40 and the bank insulators34. The fine metal mask has openings corresponding to the areas in whichit is desired to deposit the organic layers, for example the exposedportion of the transparent electrode 40 between the bank insulators 34.Elsewhere, any evaporated organic material is deposited on the finemetal mask. Alternatively, the one or more layers of organic material 60are patterned using photolithographic processes described below.

Referring next to FIG. 2G, the second electrode 52 is patterned over theone or more layers of organic material 60 in step 160. The first andsecond electrodes 55, 52 and the one or more layers of organic material60 form an organic light-emitting diode or OLED 65. When a voltage issupplied across the first and second electrodes 55, 52 so that anelectrical current flows between the first and second electrodes 55, 52through the one or more layers of organic material 60, light is emittedfrom one or more of the organic material layers.

As shown in FIG. 2H, the transparent insulator 30 or insulator 32(FIG. 1) is further patterned to expose the first electrode portion 50in step 170. The sacrificial layer 18 is then removed in step 180 frombeneath the first electrode portion 50 and transparent insulator(dielectric) 30, for example by etching (FIG. 2I). In one embodiment ofthe present invention, the sacrificial layer 18 is simply a portion ofthe source substrate 20 that is etched, for example to form a cavity, asillustrated in FIGS. 1 and 2I. In another embodiment a layer differentfrom the source substrate 20 is patterned on the source substrate 20,for example an oxide or nitride layer. The OLED structure 10 is formedon the sacrificial layer 18, with the optional addition of an etch stoplayer to protect the OLED structure 10 from the sacrificial layer 18etch when it is removed in step 180 to form a cavity. After etching, thesacrificial layer 18 is a cavity.

The sacrificial layer 18 is patterned on the source substrate 20 so thatthe OLED 65 is completely undercut and so that a tether 12 extends fromthe periphery or edge of the OLED 65 to an anchor 14. The anchor 14 canbe a portion of the source substrate 20 that is not removed when thesacrificial layer 18 is removed to form the cavity. The tether 12 can bea portion of the transparent insulator 30 (as shown) or a portion of thefirst or second metal electrodes 55, 52, or the bank insulator 34 (asshown in FIG. 10 and discussed further below). Because of the tether 12,anchor 14, and underlying sacrificial layer 18, the OLED structure 10 issuitable for micro transfer printing. During the micro transfer printingprocess, the tether 12 is fractured leaving only a portion of the tether12 as a part of the OLED structure 10 of the present invention, and theOLED structure 10 can be transferred to a destination substrate such asa display substrate.

The OLED structure 10 of FIG. 1 and as made by the process described inFIGS. 2A-2I includes first and second electrodes 55, 52. After the OLEDstructure 10 is micro transfer printed to a destination substrate,conventional photolithographic methods can be used to electricallyconnect the first and second electrodes 55, 52 to a control, power, orground circuit.

An alternative OLED structure 10 according to an embodiment of thepresent invention is illustrated in FIG. 3 and a method of making theOLED structure 10 is illustrated in the successive cross sectionillustrations of FIGS. 4A-4L. As shown in FIG. 3, the first electrode 55includes a first protrusion 53 and the second electrode 52 includes asecond protrusion 54 spatially and electrically separate from the firstprotrusion 53. The first and second protrusions 53, 54 extend in adirection from the second electrode 52 to the first electrode 55, i.e.,toward the source substrate 20. The remainder of the OLED 65 and OLEDstructure 10 are similar to those described above with respect to FIG.1.

FIGS. 4A and 4B illustrate top and bottom views of the OLED structure 10of FIG. 3 respectively, excluding the source substrate 20 and thetransparent insulator 30 in the bottom view. As viewed from the top andas shown in FIG. 4A, the OLED structure 10 includes a first electrodeportion 50 extending to one side of the OLED structure 10. The insulator32 separates the first electrode portion 50 from the second electrode52. The insulator 32 (which can be the transparent insulator 30) extendsto the other side of the OLED structure 10 and, where it extends pastthe protrusion 54, forms the tether 12.

As viewed from the bottom and as shown in FIG. 4B, the OLED structure 10includes a first electrode portion 50 extending to one side of the OLEDstructure 10. The transparent insulator 30 separates the first electrodeportion 50 from the bank insulator 34. The one or more layers of organicmaterial 60 can (but need not) extend past the bank insulator 34 and thesecond electrode 52 likewise can (but need not) extend past the one ormore layers of organic material 60. The insulator 32 (which can be thetransparent insulator 30) extends to the other side of the OLEDstructure 10 and, where it extends past the protrusion 54 (which is aportion of the second electrode 52), forms the tether 12.

The cross sections of FIGS. 5A-5J and the flow diagram of FIG. 11illustrate successive steps in making an embodiment of the presentinvention. As shown in FIG. 5A, a source substrate 20 is provided instep 100 with spatially separated indentations formed in the sourcesubstrate 20, for example by anisotropic etching, above a portion of thesource substrate 20 pre-defined as the sacrificial layer 18. The sourcesubstrate 20 can be any substrate on which the subsequent structures canbe formed and can include a glass, plastic, or semiconductor substratehaving opposing substantially planar surfaces on which lithographicprocesses can be performed. The embodiment described uses asemiconductor substrate, for example silicon (1 0 0) or silicon (1 1 1).

Referring to FIG. 5B, in step 110 a first electrode portion 50 isdeposited and patterned on or in one of the indentations in the sourcesubstrate 20 and a portion of the second electrode 52 is deposited andpatterned on or in the other of the indentations in the source substrate20. For example, the first electrode portion 50 or second electrodeportions 52 can be a metal such as aluminum, titanium, tungsten, gold,silver, or other electrically conductive materials including conductiveinks, semiconductors, or doped semiconductors.

A layer of transparent insulator 30 is patterned over the firstelectrode portion 50 in step 120, leaving an exposed gap in thetransparent insulator 30, as shown in FIG. 2C. A suitable transparentinsulator 30 is silicon nitride or silicon dioxide. The transparentinsulator 30 can be partially transparent, for example 50%, 70%, 80%,90%, or 95% transparent to visible light. A transparent insulator 30 isshown on the left in FIG. 5C. The right portion can be opaque and doesnot need to be transparent. As shown in FIG. 3, the right portion of theinsulating layer is labeled as 32, an insulator and can be formed andpatterned separately from the transparent insulator 30 and can be adifferent material than the transparent insulator 30. In an embodiment,however, both the transparent insulator 30 and insulator 32 of FIG. 1are transparent and are made in a common process with common materialsso that the insulator 32 is also a transparent insulator 30.

Referring next to FIG. 5D, in step 130 a transparent electrode 40 ispatterned over the transparent insulator 30 and in electrical contactwith the first electrode portion 50. The transparent electrode 40 istherefore in electrical contact with the first electrode portion 50 andthe first electrode 55 includes both the first electrode portion 50 andthe transparent electrode 40. As shown in FIG. 5E, a via is opened inthe transparent insulator 30 to expose a portion of the second electrode52. In an embodiment, this step is combined with the step illustrated inFIG. 5F. As shown in FIG. 5F, bank insulators 34 are formed andpatterned in step 140 on the edges of the transparent electrode 40. Thebank insulators 34 can be made of the same materials as the transparentinsulator 30 or insulator 32, or a different insulating material. Thebank insulators 34 can, but need not, be transparent.

As shown in FIG. 5G, one or more layers of organic material 60 arepatterned over the transparent electrode 40 in step 150. The one or morelayers of organic material 60 can, but need not, extend over the bankinsulators 34 and transparent insulators 30 (and insulator 32 as shownin FIG. 3). In an embodiment, the one or more layers of organic material60 are deposited by evaporation and patterned with a fine metal maskplaced over the transparent conductor 40 and the bank insulators 34. Thefine metal mask has openings corresponding to the areas in which it isdesired to deposit the organic layers; for example, the exposed portionof the transparent electrode 40 between the bank insulators 34.Elsewhere, any evaporated organic material is deposited on the finemetal mask. Alternatively, the one or more layers of organic material 60are patterned using photolithographic processes described below.

Referring next to FIG. 5H, the second electrode 52 is patterned over theone or more layers of organic material 60 in step 160 and is formed inelectrical contact with the portion of the second electrode 52 throughthe via. The first and second electrodes 55, 52 and the one or morelayers of organic material 60 form an organic light-emitting diode orOLED 65. When a voltage is supplied across the first and secondelectrodes 55, 52 so that an electrical current flows between the firstand second electrodes 55, 52 through the one or more layers of organicmaterial 60, light is emitted from one or more of the organic materiallayers.

As shown in FIG. 5I, the transparent insulator 30 or insulator 32(FIG. 1) is further patterned to expose the first electrode portion 50in step 170. The sacrificial layer 18 is then removed in step 180 frombeneath the first electrode portion 50 and transparent insulator(dielectric) 30, for example by etching (FIG. 5J). In one embodiment ofthe present invention, the sacrificial layer 18 is simply a portion ofthe source substrate 20 that is etched, for example etched to form acavity, as illustrated in FIGS. 3 and 5J. In another embodiment a layerdifferent from the source substrate 20 is patterned on the sourcesubstrate 20, for example an oxide or nitride layer. The OLED structure10 is formed on the sacrificial layer 18, with the optional addition ofan etch stop layer to protect the OLED structure 10 from the sacrificiallayer 18 etch when it is removed in step 180 to form a cavity. Afteretching, the sacrificial layer 18 is a cavity.

The sacrificial layer 18 is patterned on the source substrate 20 so thatthe OLED 65 is completely undercut and so that a tether 12 extends fromthe periphery or edge of the OLED 65 to an anchor 14. The anchor 14 canbe a portion of the source substrate 20 that is not removed when thesacrificial layer 18 is removed to form the cavity. The tether 12 can bea portion of the transparent insulator 30 (as shown) or a portion of thefirst or second metal electrodes 55, 52, or the bank insulator 34 (asshown in FIG. 10 and discussed further below). Because of the tether 12,anchor 14, and underlying sacrificial layer 18, the OLED structure 10 issuitable for micro transfer printing. During the micro transfer printingprocess, the tether 12 is fractured leaving only a portion of the tether12 as a part of the OLED structure 10 of the present invention, and theOLED structure 10 can be transferred to a destination substrate such asa display substrate.

The OLED structure 10 of FIG. 1 and as made by the process described inFIGS. 2A-2I includes first and second electrodes 55, 52. In certainembodiments, one or more steps may be omitted. After the OLED structure10 is micro transfer printed to a destination substrate, conventionalphotolithographic methods can be used to electrically connect the firstand second electrodes 55, 52 to a control, power, or ground circuit.

Another embodiment of the present invention illustrate in the crosssection of FIG. 6 uses a unitary first electrode 55. By unitary it ismeant that the first electrode 55 consists of only one kind of materialin a single structure in contrast to the first electrode 55 of theembodiments of FIGS. 1 and 3, in which the first electrode 55 has twoparts, a first electrode portion 50 and a transparent electrode portion40. As shown in FIG. 6, the separate transparent electrode 40 is omittedand the tether 12 is formed by the bank insulator 34. The structureshown in FIG. 6 can also be used with the first and second protrusions53, 54 shown in the embodiment of FIG. 3.

The evaporated organic materials can be patterned by using a fine metalshadow mask that prevents the deposition of organic particles onportions of a substrate covered by the shadow mask. In an embodiment ofthe present invention, the organic materials are patterned usingphotolithographic methods. Because the present invention contemplatesthe deposition of only a single set of organic materials on a sourcesubstrate 20 and multiple colors in a display are provided withdifferent sets of organic materials on respective different sourcesubstrates 20 rather than on a common substrate, the photolithographicprocess do not damage pre-existing layers of organic materials.

FIG. 7A illustrates a portion of an OLED structure 10 corresponding tothe structures of FIGS. 2F and 5G except that the one or more layers oforganic material 60 are unpatterned. Referring to FIG. 7B, anunpatterned layer of electrically conductive material comprising thesecond electrode 52 is deposited on the unpatterned one or more layersof organic material 60.

Next, as shown in FIG. 7C, a protective layer 70 is patterned on theunpatterned second electrode 52 and then exposed to an active material,such as an etchant, a dry etchant, an ion etchant, or a plasma. Theactive material removes the exposed portions of the second electrode 52as shown in FIG. 7D. The process is then optionally repeated with thesame or a different etchant (FIG. 7E) to form the patterned one or morelayers of organic materials 60 illustrated in FIG. 7F.

The patterned protective layer 70 is optionally removed (not shown) orcoated with a second layer 56 of the electrical conductor of the secondelectrode 52 (FIG. 7G) and patterned to further protect any exposededges of the one or more layers of organic materials 60 (FIG. 7H). Ifnot removed earlier, the patterned protective layer 70 is optionallyremoved (FIG. 7I) and an additional layer of second electrode 52material is optionally provided (FIG. 7J). After patterning the organicmaterials layer 60 a barrier material 71 may be deposited and patternedto encapsulate the organic materials and at least a portion of thesecond electrode 52, optionally having at least one opening to provideaccess to the second electrode 52. A third conductive layer 72 that likethe barrier material 71 has moisture or environmental protectioncharacteristics may be deposited and patterned over some portion of theorganic materials and the second electrode, thereby forming (FIG. 7M) aprotecting encapsulation layer composed of a combination of barriermaterial 71 and the third conductive layer 72. The insulator 32 is thenpatterned (FIG. 7K) and the sacrificial layer 18 etched (FIG. 7L) toform the OLED structure 10, optionally having the protectingencapsulation layer (FIG. 7N). In some embodiments, the organicstructure is photoluminescent and contains only organic layers andtransparent dielectric or barrier layers with no exposed electricalterminals (FIG. 7O).

Therefore, a method of patterning the one or more layers of organicmaterial 60 on the patterned first electrode 55 and patterning thesecond electrode 52 on the one or more layers of organic material 60includes blanket depositing the layers of organic material 60 over anarea of the source substrate 20, blanket depositing the second electrode52 over the layers of organic material 60, and forming a patternedprotective layer 70 over the second electrode 52. The patternedprotective layer defines the pattern of the one or more layers oforganic material 60. The second electrode 52 is patterned by exposingthe second electrode 52 to an active material that removes secondelectrode material exposed to the line-of-flight of the active material.The one or more layers of organic material 60 are patterned by exposingthe one or more layers of organic material 60 to an active material thatremoves the one or more layers of organic material 60 exposed to theline-of-flight of the active material. The patterned protective layer isoptionally removed. Additional patterned second electrode material isoptionally provided to form the patterned second electrode 52 andprotect the one or more layers of organic material 60. In an embodiment,the active material is a gas, a plasma, or not a liquid.

The process described in FIGS. 7A-7L does not require the use of finemetal shadow masks and is therefore not limited by the sizes of themechanical structures inherent in the shadow masks. Instead, higherresolution photolithographic techniques are used and, in consequence,smaller OLED devices for higher resolution displays are possible.Therefore, according to an embodiment of the present invention, OLED 65has a light-emitting area that has a dimension parallel to the extent ofthe first electrode 55 that is less than or equal to 40 microns, lessthan or equal to 20 microns, less than or equal to 10 microns, or lessthan or equal to 5 microns. Alternatively, or in addition, the OLED 65has a light-emitting area that is less than or equal to 1600 squaremicrons, less than or equal to 800 square microns, less than or equal to400 square microns, less than or equal to 200 square microns, less thanor equal to 100 square microns, or less than or equal to 50 squaremicrons.

According to different embodiments of the present invention, the OLEDstructure 10 can have a top-emitter configuration or a bottom-emitterconfiguration. FIG. 1 and FIGS. 2A-2I illustrate a structure and methodfor a bottom-emitter embodiment in which light from the one or morelayers of organic material 60 passes through the bottom, transparentelectrode 40 and transparent insulator 30. Referring to FIG. 6, atop-emitter embodiment uses a unitary opaque first electrode 55 thatextends between the bank insulators 34 and under the one or more layersof organic material 60. The bank insulators 34 are also helpful toinsulate the transparent electrode 40 from the second electrode 52. Thesecond electrode 52 is transparent, for example made of a metal oxidesuch as indium tin oxide or aluminum zinc oxide. In other embodiments,for example alternative configurations of FIGS. 1 and 3, the transparentelectrode 40 is replaced with an opaque and preferably reflectiveelectrode and the second electrode 52 is transparent. In theseembodiments of the present invention, light emitted from the one or morelayers of organic material 60 in response to current flowing between thefirst and second electrodes 55, 52 passes through the top, transparentsecond electrode 52.

As shown in FIGS. 1, 3, and 6, OLED structures 10 of the presentinvention can be constructed over a sacrificial layer 18 on a sourcesubstrate 20. The source substrate 20 has a portion defining an anchor14 and the sacrificial layer 18 is formed on the source substrate 20 andadjacent to the anchor 14. The OLED 65 is disposed on the sacrificiallayer 18 and the tether 12 is connected to the anchor 14. This OLEDstructure 10 is adapted for micro transfer printing to a destinationsubstrate such as a display substrate.

According to further embodiments of the present invention, a pluralityof OLED structures 10 are formed on the source substrate 20. In oneembodiment, the one or more layers of organic material 60 in each of theOLED structures 10 is the same and at least one of the one or morelayers of organic material 60 emits red light, green light, or bluelight.

Alternatively, first and second OLED structures 10 are formed on thesource substrate 20. The first OLED structure 10 includes at least onelayer of organic material that emits a first color of light and thesecond OLED structure 10 includes at least one layer of organic materialthat emits a second color of light different from the first color oflight. Additionally, a third OLED structure 10 can be formed on thesource substrate 20 that includes at least one layer of organic materialthat emits a third color of light different from the first color oflight and different from the second color of light. The first color oflight can be red, the second color of light can be green, and the thirdcolor of light can be blue.

Referring to the perspective of FIG. 8, a micro transfer printed OLEDdisplay 82 having printable organic light-emitting diode structures 10includes a display substrate 80 having one or more organiclight-emitting diode structures 10 disposed on the display substrate 80.A first electrical conductor 98 is electrically connected to the firstelectrode 55 and a second electrical conductor 99 is electricallyconnected to the second electrode 52. In various embodiments, the firstelectrical conductor 98 or the second electrical conductor 99 is locatedon the display substrate 80 or the first and second electricalconductors 98, 99 are both located on the display substrate 80. Thefirst and second electrical conductors 98, 99 can be connected to wiresor form a bus 96 that is connected to a controller 92. The controller 92provides signals, power, or ground through the wires 96 and the firstand second electrical conductors 98, 99 to control the organiclight-emitting diode structures 10 to emit light. Although for clarity,the OLED structures 10 are shown interconnected serially by the firstand second electrical conductors 98, 99, in an alternative embodiment,the OLED structures 10 can be controlled using conventional column androw drivers.

The OLED structures 10 can be grouped into pixels 90. The pixels 90 canhave OLED structures 10 that all emit the same color of light or thepixels 90 can be full-color pixels 90 that each have different OLEDstructures 10. For example, the pixels 90 can include at least a firstOLED structure 10 that emits light of a first color and a second OLEDstructure 10 that emits light of a second color different from the firstcolor. The pixels 90 can also include a third OLED structure 10 thatemits light of third color different from the first and second colors.The colors can be red, green, and blue and the first OLED structure 10can be a red OLED structure 10R that emits red light, the second OLEDstructure 10 can be a green OLED structure 10G that emits green light,and the third OLED structure 10 can be a blue OLED structure 10B thatemits blue light.

In an alternative embodiment of the present invention, not shown, acolor display includes both organic light-emitting diodes and inorganiclight-emitting diodes. Thus, the one or more OLED structures 10 caninclude a first OLED structure 10 that emits light of a first color anda second inorganic light-emitting diode that emits light of a secondcolor different from the first color. Both the organic and inorganiclight-emitting diodes can be micro transfer printed from a sourcesubstrate 20 to the display substrate 80 to form a heterogeneousdisplay. For example, the red light emitter can be a red OLED and thegreen and blue light emitters can be inorganic light emitters.

In a further embodiment of the present invention the display includespixel controllers 94 (shown in FIG. 9) associated with or a part of thepixels 90 that are electrically connected to the first and secondelectrodes 55, 52 of the OLED structures 10 in the pixel 90 group tocontrol the OLED structures 10 to emit light. The pixel controllers 94can be an integrated circuit that includes control circuits responsiveto the controller 92 through the wires 96 and first and secondelectrical conductors 98, 99.

In an embodiment of the present invention and as shown in FIG. 9, thepixel controllers 94 and the OLED structures 10 in a pixel 90 aredisposed on a pixel substrate 84 that is separate and distinct from thedisplay substrate 80 and forms a pixel component 16. The pixel substrate84 can be a semiconductor substrate on or in which the pixel controllercircuits are formed (not shown), or the pixel substrate 84 can also beseparate and distinct from the pixel controller 94 substrate (as shown).

As shown in FIG. 10, the pixel components 16 are then disposed on thedisplay substrate 80, for example by micro transfer printing to form amicro-transfer printed display 82 or by using pick-and-place technology.The pixel components 16 can be surface mount components.

The present invention provides an advantage over structures and methodsof the prior art in that OLED structures 10 of the present inventionemitting different colors of light can each be made on a differentsource substrate 20 so that each source substrate 20 can include OLEDstructures 10 that emit light of only a single color. This reducesalignment and tolerance issues and avoid repeatedly contacting thesource substrate 20 with shadow masks. Referring to FIG. 12, a redsource substrate 20R is a source substrate 20 with an organic layer thatemits red light, a green source substrate 20G is a source substrate 20with an organic layer that emits green light, and a blue sourcesubstrate 20B is a source substrate 20 with an organic layer that emitsblue light. Each of the red, green, and blue source substrates aredifferent and separate source substrates 20 that can each supply a red,green, or blue OLED structure 10R, 10G, or 10B, respectively.

As shown in FIG. 12, a red source substrate 20R is provided in step100R, a green source substrate 20G is provided in step 100G, a bluesource substrate 20B is provided in step 100B, and a destinationsubstrate such as a displays substrate 80 is provided in step 105. Asshown in FIG. 11, the steps 110 through 140 form a first electrodestructure in step 101 and the steps 160-180 form a second electrodestructure in step 103. After the different source and destinationsubstrates 20, 80 are provided in FIG. 12, the first electrodes 55 areseparately and independently formed on each of the red, green, and bluesource substrates 20R, 20G, and 20B in step 101. One or more layers oforganic material 60 that emit red light are then patterned on the redsource substrate 20R, one or more layers of organic material 60 thatemit green light are then patterned on the green source substrate 20G,and one or more layers of organic material 60 that emit blue light arethen patterned on the blue source substrate 20B in steps 150R, 150G,150B, respectively. The second electrodes 52 are separately andindependently formed on each of the red, green, and blue layers oforganic material on each of the red, green, and blue source substrates20R, 20G, and 20B in step 103. The blue OLED structures 10B are thenmicro transfer printed to the destination substrate 80, the green OLEDstructures 10G are micro transfer printed to the destination substrate80, and the red OLED structures 1OR are micro transfer printed to thedestination substrate 80 in steps 190B, 190G, and 190R to form thedisplay structure illustrated in FIG. 8. The steps 190B, 190G, and 190Rcan be performed in any order. If pixel components 16 are desired, thered, green, and blue OLED structures 10R, 10G, 10B from the red, green,and blue source substrates 20R, 20G, and 20B, respectively, are eachmicro transfer printed onto the pixel substrate 84 and then the pixelsubstrates 84 are disposed on the destination substrate 80.

The controller 92 and pixel controllers 94 can be made in one or moreintegrated circuits having separate, independent, and distinctsubstrates. For example, the pixel controllers 94 can be chiplets,small, unpackaged integrated circuits such as unpackaged diesinterconnected with wires connected to contact pads on the chiplets. Thechiplets can be disposed on an independent light-emitter substrate, suchas a pixel substrate 84 or a display substrate 80. If the chiplets aredisposed on pixel substrates 84, the pixel substrates 84 can be disposedon the display substrate 80. In an embodiment, the chiplets are made ona semiconductor wafer and have a semiconductor substrate and the displaysubstrate 80 is or includes glass, resin, polymer, plastic, or metal.The pixel substrates 84 can be made in semiconductor materials or inglass, resin, polymer, plastic, or metal. Semiconductor materials (forexample silicon) and processes for making small integrated circuits arewell known in the integrated circuit arts. Likewise, display substrates80 (destination substrates) and means for interconnecting integratedcircuit elements on the display substrate 80 are well known in theprinted circuit board arts. The chiplets can be applied to the pixelsubstrates 84 or to the display substrate 80 using micro transferprinting. The pixel substrates 84 can be applied to the displaysubstrate 80 using micro transfer printing.

In one method of the present invention the pixel substrates 84 aredisposed on the display substrate 80 by micro transfer printing usingcompound micro assembly structures and methods, for example as describedin U.S. patent application Ser. No. 14/822,868, filed Aug. 10, 2015,entitled Compound Micro-Assembly Strategies and Devices, which is herebyincorporated by reference in its entirety. However, since the pixelsubstrates 84 are larger than the chiplets, in another method of thepresent invention, the pixel substrates 84 are disposed on the displaysubstrate 80 using pick-and-place methods found in the printed-circuitboard industry, for example using vacuum grippers. The OLED structures10 or pixel controllers 94 on the pixel substrates 84 can beinterconnected using photolithographic methods and materials or on thedisplay substrate 80 using printed circuit board methods and materials.

In useful embodiments the display substrate 80 includes material, forexample glass or plastic, different from a material in anintegrated-circuit or chiplet substrate, for example a semiconductormaterial such as silicon. The pixel controllers 94 can be formedseparately on separate semiconductor substrates, assembled onto thepixel substrates 84, and then the assembled unit is disposed on thesurface of the display substrate 80. This arrangement has the advantagethat the OLED structure 10 can be separately tested on the pixelsubstrates 84 and the pixel substrate 84 accepted, repaired, ordiscarded before it is located on the display substrate 80, thusimproving yields and reducing costs.

The OLED structures 10 are electrically connected to one or moreelectrically conductive wires 98, 99 that electrically connect the OLEDstructures 10 and the pixel controllers 94 or controllers 92 to conductpower, a ground reference voltage, or signals for controlling the OLEDstructures 10. In an embodiment, the wires 96 are connected to acontroller 92 that is external to the display substrate 80. In analternative embodiment, not shown, the controller 92 is located on thedisplay substrate 80 outside a display area including the OLEDstructures 10. If individual pixel controllers 94 are used, they can bespatially distributed over the display substrate 80 in spatialcorrespondence to the pixels 90 or on pixel substrates 84 that arespatially distributed over the display substrate 80. The controller 92controls the OLED structures 10 or pixel controllers 92 by, for example,providing power, a ground reference signal, and control signals.

In an embodiment, the OLED structures 10 are transfer printed to thepixel substrates 84 or to the display substrate 80 in one or moretransfers. For a discussion of micro-transfer printing techniques see,U.S. Pat. Nos. 8,722,458, 7,622,367 and 8,506,867, each of which ishereby incorporated by reference. The transferred OLED structures 10 arethen interconnected, for example with conductive wires and optionallyincluding connection pads and other electrical connection structures, toenable the controller 92 or pixel controllers 94 to electricallyinteract with the OLED structures 10 to emit light. In an alternativeprocess, the transfer of the OLED structures 10 is performed before orafter all of the first and second electrical conductors 98, 99 are inplace. Thus, in embodiments the construction of the first and secondelectrical conductors 98, 99 can be performed before the OLED structures10 are printed, or after the OLED structures 10 are printed, or both. Inan embodiment, the controller 92 is externally located (for example on aseparate printed circuit board substrate) and electrically connected tothe conductive wires using connectors, ribbon cables, or the like.Alternatively, the controller 92 is affixed to the display substrate 80outside the area on the display substrate 80 in which the OLEDstructures 10 are located and electrically connected to the first andsecond electrical conductors 98, 99 using wires and buses 96, forexample using surface mount and soldering technology.

According to various embodiments of the present invention, themicro-transfer-printed OLED display 82 can include a display substrate80 on which the OLED structures 10 are disposed. The display substrate80 usefully has two opposing smooth sides suitable for materialdeposition, photolithographic processing, or micro-transfer printing ofOLED structures 10. The display substrate 80 can have the size of aconventional display, for example a rectangle with a diagonal of a fewcentimeters to one or more meters. Such substrates are commerciallyavailable. The display substrate 80 can include polymer, plastic, resin,polyimide, PEN, PET, metal, metal foil, glass, a semiconductor, orsapphire and have a transparency greater than or equal to 50%, 80%, 90%,or 95% for visible light. In some embodiments of the present invention,the OLED structures 10 emit light through the display substrate 80. Inother embodiments, the OLED structures 10 emit light in a directionopposite the display substrate 80. The display substrate 80 can have athickness from 5 to 10 microns, 10 to 50 microns, 50 to 100 microns, 100to 200 microns, 200 to 500 microns, 500 microns to 0.5 mm, 0.5 to 1 mm,1 mm to 5 mm, 5 mm to 10 mm, or 10 mm to 20 mm. According to embodimentsof the present invention, the display substrate 80 can include layersformed on an underlying structure or substrate, for example a rigid orflexible glass or plastic substrate. In an embodiment of the presentinvention, the OLED structures 10 have light-emissive areas of less than1600 square microns, less than or equal to 800 square microns, less thanor equal to 400 square microns, less than or equal to 200 squaremicrons, less than or equal to 100 square microns, or less than or equalto 50 square microns. In other embodiments, the OLED structures 10 havephysical dimensions that are less than 100 μm, for example having awidth from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, having a length from5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, or having a height from 2 to 5μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm. The OLED structures 10 canprovide highly saturated display colors and a substantially Lambertianemission providing a wide viewing angle.

According to various embodiments, the micro-transfer-printed OLEDdisplay 82 of the present invention, includes a variety of designshaving a variety of resolutions, OLED structure 10 sizes, and displayshaving a range of display areas. For example, display areas ranging from1 cm by 1 cm to 10 m by 10 m in size are contemplated. The resolution ofOLED structures 10 over a display area can also vary, for example fromOLED structures 10 per inch to hundreds of light emitters per inch.Thus, the present invention has application in both low-resolution andvery high-resolution displays and from very small to very largedisplays.

As shown in FIGS. 1, 3, and 6, the full-color pixels 90 form a regulararray on the display substrate 80. Alternatively, at least some of thefull-color pixels 90 have an irregular arrangement on the displaysubstrate 80.

In an embodiment, the integrated circuits or chiplets are formed insubstrates or on supports separate from the display substrate 80. Forexample, the OLED structures 10 are separately formed in a semiconductorsource wafer. The OLED structures 10 are then removed from the sourcewafer and transferred, for example using micro transfer printing, to thedisplay substrate 80 or pixel substrate 84.

By employing a multi-step transfer or assembly process, increased yieldsare achieved and thus reduced costs for the micro-transfer-printed OLEDdisplay 82 of the present invention. Additional details useful inunderstanding and performing aspects of the present invention aredescribed in U.S. patent application Ser. No. 14/743,981, filed Jun. 18,2015, entitled Micro-Assembled Micro LED Displays and Lighting Elements,which is hereby incorporated by reference in its entirety.

As is understood by those skilled in the art, the terms “over”, “under”,“above”, “below”, “beneath”, and “on” are relative terms and can beinterchanged in reference to different orientations of the layers,elements, and substrates included in the present invention. For example,a first layer on a second layer, in some embodiments means a first layerdirectly on and in contact with a second layer. In other embodiments, afirst layer on a second layer can include another layer there between.Additionally, “on” can mean “on” or “in.” As additional non-limitingexamples, a sacrificial layer is considered “on” a substrate when alayer of sacrificial material is on top of the substrate, when a portionof the substrate itself is the sacrificial layer, or when thesacrificial layer comprises material on top of the substrate and aportion of the substrate itself.

Having described certain embodiments, it will now become apparent to oneof skill in the art that other embodiments incorporating the concepts ofthe disclosure may be used. Therefore, the invention should not belimited to the described embodiments, but rather should be limited onlyby the spirit and scope of the following claims.

Throughout the description, where apparatus and systems are described ashaving, including, or comprising specific components, or where processesand methods are described as having, including, or comprising specificsteps, it is contemplated that, additionally, there are apparatus, andsystems of the disclosed technology that consist essentially of, orconsist of, the recited components, and that there are processes andmethods according to the disclosed technology that consist essentiallyof, or consist of, the recited processing steps.

It should be understood that the order of steps or order for performingcertain action is immaterial so long as the disclosed technology remainsoperable. Moreover, two or more steps or actions in some circumstancescan be conducted simultaneously. The invention has been described indetail with particular reference to certain embodiments thereof, but itwill be understood that variations and modifications can be effectedwithin the spirit and scope of the invention.

PARTS LIST

-   10 organic light-emitting diode structure-   10R red organic light-emitting diode structure-   10G green organic light-emitting diode structure-   10B blue organic light-emitting diode structure-   12 tether-   14 anchor-   16 pixel component-   18 sacrificial layer-   20 source substrate-   20R red source substrate-   20G green source substrate-   20B blue source substrate-   30 transparent insulator-   32 insulator-   34 bank insulator-   40 transparent electrode-   50 first electrode portion-   52 second electrode-   53 first protrusion-   54 second protrusion-   55 first electrode-   56 second layer of second electrode-   60 organic material layer(s)-   65 organic light-emitting diode-   70 patterned protective layer-   71 barrier material-   72 third conductive layer-   80 destination substrate/display substrate-   82 micro-transfer-printed OLED display-   84 pixel substrate-   90 pixel-   92 controller-   94 pixel controller-   96 wires/bus-   98 first electrical conductor-   99 second electrical conductor-   100 provide source substrate step-   100R provide red source substrate step-   100G provide green source substrate step-   100B provide blue source substrate step-   101 form first electrode structure step-   103 form second electrode structure step-   105 provide destination substrate step-   110 pattern first electrode step-   120 pattern transparent dielectric step-   130 pattern transparent electrode step-   140 pattern bank insulator step-   150 pattern OLED layers step-   150R pattern red OLED layers step-   150G pattern green OLED layers step-   150B pattern blue OLED layers step-   160 pattern second electrode step-   170 pattern dielectric step-   180 etch sacrificial layer step-   190R micro transfer print red OLED structure step-   190G micro transfer print green OLED structure step-   190B micro transfer print blue OLED structure step

1-40. (canceled)
 41. A method of making an OLED structure, comprising:providing a source substrate; patterning a sacrificial layer on thesource substrate; patterning a first electrode on the sacrificial layer;patterning one or more layers of organic material on at least a portionof the patterned first electrode; and patterning a second electrode onat least a portion of the one or more layers of organic material to forman OLED structure.
 42. The method of claim 41, comprising removing atleast a portion of the sacrificial layer, thereby partially releasingthe OLED structure from the source substrate.
 43. The method of claim42, comprising micro transfer printing the OLED structure from thesource substrate to a display substrate.
 44. The method of claim 41,wherein the one or more layers of organic material are one or morelayers of organic material that emit blue light and the OLED structureis a blue OLED structure that emits blue light when a current is appliedthereto.
 45. The method of claim 44, comprising: forming a red OLEDstructure that emits red light when a current is applied thereto,comprising: providing a second source substrate; patterning a secondsacrificial layer on or in the second source substrate; patterning afirst electrode on the second sacrificial layer; patterning one or morelayers of organic material that emit red light on at least a portion ofthe patterned first electrode on the second sacrificial layer; andpatterning a second electrode on at least a portion of the one or morelayers of organic material that emit red light; and forming a green OLEDstructure that emits green light when a current is applied thereto,comprising: providing a third source substrate; patterning a thirdsacrificial layer on or in the third source substrate; patterning afirst electrode on the third sacrificial layer; patterning one or morelayers of organic material that emit green light on at least a portionof the patterned first electrode on the third sacrificial layer; andpatterning a second electrode on at least a portion of the one or morelayers of organic material that emit green light.
 46. The method ofclaim 45, comprising: micro transfer printing the red OLED structurefrom the red source substrate to a display substrate; micro transferprinting the green OLED structure from the green source substrate to thedisplay substrate; and micro transfer printing the blue OLED structurefrom the blue source substrate to the display substrate.
 47. The methodof claim 45, wherein at least ten thousand, one-hundred thousand, onemillion, or ten million OLEDs are on each source substrate.
 48. Themethod of claim 41, wherein patterning the one or more layers of organicmaterial on the patterned first electrode comprises depositing thelayers of organic material through a fine metal shadow mask.
 49. Themethod of claim 41, wherein patterning the one or more layers of organicmaterial on the patterned first electrode and patterning the secondelectrode on the one or more layers of organic material comprises:blanket depositing the layers of organic material over an area of thesource substrate; blanket depositing the second electrode over thelayers of organic material; forming a patterned protective layer overthe second electrode, the patterned protective layer defining thepattern of the one or more layers of organic material; patterning thesecond electrode by exposing the second electrode to an active materialthat removes second electrode material exposed to line-of-flight of theactive material; and patterning the one or more layers of organicmaterial by exposing the one or more layers of organic material to anactive material that removes the one or more layers of organic materialexposed to the line-of-flight of the active material.
 50. The method ofclaim 49, wherein patterning the one or more layers of organic materialon the patterned first electrode and patterning the second electrode onthe one or more layers of organic material comprises: removing thepatterned protective layer.
 51. The method of claim 50, whereinpatterning the one or more layers of organic material on the patternedfirst electrode and patterning the second electrode on the one or morelayers of organic material comprises: providing additional patternedsecond electrode material to form the patterned second electrode andprotect the one or more layers of organic material.
 52. The method ofclaim 41, wherein the organic light-emitting diode is a top emitter. 53.The method of claim 41, wherein the organic light-emitting diode is abottom emitter.
 54. The method of claim 41, wherein the organic-lightemitting diode a light-emissive area of less than 1600 square microns.55. The method of claim 41, wherein the organic-light emitting diode hasat least one of a width from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, alength from 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm, and a height from 2to 5 μm, 4 to 10 μm, 10 to 20 μm, or 20 to 50 μm. 56-67. (canceled)